四工位梯度烧结炉:4 Station Indexing Sintering Furnace
名称:厂家 发布时间: 2020-10-23 点击数:156
西格马四工位梯度烧结炉
sigma四工位梯度烧结炉是我们为电子元件高温烧结量身定制的额定产量模型。同时处理四个负载,形成半连续烧结过程。
熔炉的可用区域为12“直径x 22”高(305 mm x 559 mm),这种设计非常适合大批量加工。
该炉有五个燃烧室,一个底部分度室,包含一个传送机构,一个用于装载和卸载,一个用于加热室,一个用于冷却,设计后一个用于控制氧化。在正常运行期间,所有腔室彼此隔离。
液压升降机和电动分度机构将负载堆从一个工位移动到下一个工位。根据工艺参数,该炉每45分钟产生一个烧结负载。
高温区的温度额定可达2100°C,由钽或钨制成。
一个10〃或16〃的高通量扩散泵系统处理装船放气。HMI计算机接口从开始到结束运行完全自动化的循环,与生产网络集成,提供产品跟踪和配方选择。
有关单、双或小批量烧结模型,请参考我们的其他烧结炉型号。
sigma 4-station indexing sintering furnace is our highest throughput model tailored for high temperature sintering of electronic components. Four loads are processed simultaneously, creating a semi-continuous process sintering process.
The furnace has a usable zone of 12” diameter x 22” high (305 mm x 559 mm), this design is ideal for high volume large batch processing.
This furnace features five chambers, a bottom indexing chamber containing a transfer mechanism, a chamber for loading and unloading, a heating chamber, one for cooling and lastly one for controlled oxidation. During normal operation, all chambers are isolated from one another.
A hydraulic lift and motorized indexing mechanism move the load stacks from one station to the next. Depending on process parameters, this furnace proces a sintered load every 45 minutes.
The hot zone is capable of temperatures up to 2100°C and is manufactured with tantalum or tungsten.
A high throughput 10″ or 16″ diffusion pumping system handles load out-gassing. The HMI computer interface runs completely automated cycles start to finish, integrating with proction networks to provide proct tracking and recipe selection.
Refer to our other sintering furnace models for single, double or small batch sintering models.
一般规格:
五腔设计,可同时处理4个负载
单的加载、加热、冷却和氧化室
热区尺寸12“直径x 22”高(305 mm x 559 mm)
钽或钨加热区(其他材料可用)
额定温度2100°C(3812°F)
+/-10°C可用区温度梯度
10〃或16〃大容量扩散泵送系统
用于快速负载冷却的气体换热器
我们设计的批量烧结炉
带计算机接口的全自动循环
General specifications:
Five-chamber design to process 4 loads simultaneously
Separate loading, heating, cooling and oxidation chamber
Hot zone Size 12” diameter x 22” high (305 mm x 559 mm)
Tantalum or tungsten heating zone (other materials available)
2100°C (3812 °F) maximum temperature
+/- 10°C temperature gradient across usable zone
High capacity diffusion pumping system 10″ or 16″
Gas heat exchanger for rapid load cooling
Our highest throughput batch sintering furnace
Fully automated cycles with computer interface
炉膛
装卸舱
新工作堆栈的特定过程信息可以在PC机中的任何点进行条形码编码,并将被缓冲,直到新的运行开始。加载循环将在传送到烧结室之前准备好气氛。负载完成后,可在操作期间随时从(卸载)加载室中移除。该室有自己的真空泵和阀门,用于热循环前的大气准备。
热区室
炉心,这一区域具有极好的均匀性(+/-10°C),可由钨、钽或钼制成。加热元件和防护罩可以用不同的薄板厚度、刚性化和颗粒稳定的材料制造,以设计限度地延长预期寿命。在这个特殊的熔炉中,热区可以容纳直径达8〃、高16〃的工作烟囱。
热区室与其他室隔离,并连接到高真空泵系统。泵送系统在加热过程中去除艺术品中的挥发物和副产品。
快速冷却室
配有大功率热交换器,该腔室允许100磅的新烧结负载在30分钟内冷却至环境温度,入口温度高于1000°C。特的红外温度传感器确保准确读数并测量负载温度,而不是周围的冷却气体温度。
控制氧化室
通过控制卸载后以不受控制的方式发生的氧化过程来确保工件质量的技术。与任何其他腔室一样,它的环境与其他腔室是密封的,除非在负载转移期间。
转载室
工作转换室位于上述四个腔室的正下方。它包含一个机械装置,用于在站与站之间的运输过程中提升、降低和移动工作堆。提供一个腔室门,以便进入炉膛进行维护。设有两个观察窗。该腔室确保了一个无氧化的环境,以获得设计的热区寿命和惰性工作转移条件。
所有炉室均采用不锈钢制造,采用Heli电弧焊,真空密封,抛光,并在需要时采用双层壁(水套)。所有O形密封圈均为氟橡胶。该系统配有所有安全联锁装置和装置,以符合NFPA工业炉规范。
电源
加热器电源是一个100至150 kVA(取决于额定温度和斜坡速率)的三相SCR控制变压器组件,安装在电源和仪表外壳中。变压器的尺寸有额外的功率,以实现快速斜坡速率,变压器上有两个二次电压分接头,一个用于新元件,另一个匹配以补偿因元件老化而引起的电阻变化。一组水冷电力电缆将电力从变压器电源母线传输到加热元件。所有的保护和安全装置都是一体的,符合所有适用的NFPA标准。
控制系统
我们的批式烧结炉具有直观的人机界面软件(Wonderware™,罗克韦尔软件FTView™,西门子TIA Wincc™,以完全自动化从开始到结束的批处理周期,只需设计少的操作员交互。
从开始到结束,一个完整的烧结配方包含了所有需要的信息。对于工程师或维护人员来说,所有系统功能都可以手动控制,并且可以通过软件界面进行设置。人机界面运动直观的操作员显示趋势,报警,安全,日志,系统概述和运行状态。
批次ID或零件号在运行前扫描或输入,在中央数据库中查找,并加载包含运行特定热量、冷却和受控氧化曲线的所有参数的相应配方。运行完成后,一个信标和弹出屏幕将提醒操作员。
真空系统
高真空泵送系统能够将该炉抽真空至10-6托范围,并能够处理较大的气体负荷。真空系统包括:
10〃扩散泵(5300 lps)或16〃扩散泵(8000 lps)
带限位开关的电空真空闸阀
冷冻油和反流阀可更好地防止冷冻油液位下降
机械泵或带鼓风机的干式泵,用于快速室泵送。
二级旋转叶片扩散保持泵
各种腔室的真空计。
电磁阀操作的放气阀和手动泄漏止回阀。
可选涡轮泵系统可获得10-7托范围的真空度。
气体系统
该炉设计用于在内部压力为2p.S.I.G.(0.14kg/sq.cm.)的工艺气体环境中或在真空中运行。所有腔室均配有压力开关和安全阀,用于监控
Furnace Chambers
Load/Unload Chamber
Specific process information for new work stacks can be bar-coded at any point in the PC and will be buffered until the new run is initiated. The loading cycle will prepare the atmosphere before being transferred to the sintering chamber. When a load is complete, it can be removed from the (un)loading chamber at any time ring operation. This chamber has it’s own vacuum pump and valve for atmosphere preparation prior to the heat cycle.
Hot Zone Chamber
The heart of the furnace, this zone with excellent uniformity (+/- 10 °C), can be made out of Tungsten, Tantalum, or Molybdenum. Heating elements and shields can be fabricated with different sheet thicknesses, rigidized and grain-stabilized materials to maximize life expectancy. The hot zone in this particular furnace can accommodate a work stack that is up to 8″ in diameter and 16″ high.
The hot zone chamber is isolated from the other chambers and connects to the high vacuum pumping system. The pumping system removes volatiles and byprocts from the arts as they are heated.
Rapid Cooling Chamber
Equipped with a high power heat exchanger, this chamber allows a newly sintered load of 100 Lbs. to be cooled to ambient in less than 30 minutes with entry temperatures above 1000°C. A unique infra-red temperature sensor ensures accurate readings and measures load temperature rather than the surrounding cooling gas temperatures.
Controlled Oxidation Chamber
A technique ensuring quality work parts by controlling the oxidation process that would otherwise take place in an uncontrolled manner after unloading. As any other chamber, it’s environment is sealed from the other chambers except ring load transfer.
Work Transfer Chamber
The work-transfer chamber is located directly beneath the four chambers described above. It contains the mechanism for raising, lowering and moving the work stacks in transit from station to station. A chamber door is provided to give access to the furnace chamber for maintenance. Two windows are provided for observation. This chamber ensures an oxidation free environment for maximum hot zone life and inert work transfer conditions.
All furnace chambers are fabricated of stainless steel, Heli-arc welded, vacuum tight, polished and double-walled (water-jacketed) where needed. All “O” ring seals are of Viton. The system is equipped with all safety interlocks and provisions to comply with NFPA codes for instrial furnaces.
Power Supply
The heater power supply is a 100 to 150 kVA (dependent on maximum temperature and ramp rate) three-phase SCR-controlled transformer package housed in the power supply & instrumentation enclosure. The transformer is sized with extra power for fast ramp rates and has two secondary voltage taps on the transformer, one for new elements and one to match to compensate for any change in resistance e to element aging. A set of water cooled Power Cables carries power from the transformer power bus to the heating elements. All protective and safety devices are incorporated, meeting all applicable NFPA standards.
Control System
Our batch sintering furnaces feature intuitive HMI software ( Wonderware ™, Rockwell Software FTView ™, Siemens TIA Wincc ™, or others) to fully automate the batch cycles from start to finish with minimal operator interaction.
A recipe contains all information needed to complete a sintering run from start to finish. For engineers or maintenance personnel, all system functions can be controlled manually and settings are available through the software interface. The HMI sports intuitive operator displays for trending, alarming, security, logging, system overviews and run status.
Batch IDs or part numbers are scanned in or entered before a run, looked up in a central database and a corresponding recipe is loaded containing all parameters to run a specific heat, cool down and controlled oxidation profile. When a run is complete, a beacon and pop-up screen will alert the operator.
Vacuum system
The High Vacuum Pumping System is capable of evacuating this furnace down to the 10-6 Torr Range and is able to handle large gas loads. The vacuum system includes the following:
10″ diffusion pump, (5300 lps) or 16″ diffusion pump (8000 lps)
Electro-pneumatic vacuum gate valves with limit switches
Cold trap with refrigeration chiller for better vacuum levels and to prevent oil vapor backstreaming
Mechanical pump or dry pump with blower sized for rapid chamber pump-down.
Two-stage rotary vane diffusion holding pump
Vacuum gauges for the various chambers.
Solenoid-operated air release valves and manual leak check valve.
An optional turbo pumping system is available to obtain a vacuum level of 10-7 Torr range.
Gas System
This furnace is designed to operate in a process gas environment at internal pressures of 2 P.S.I.G. (0.14 kg/sq. cm.) or in vacuum. All chambers are equipped with pressure switches and relief valves to monitor and control gas pressures.
The process gas system includes components to allow a controlled oxidation step for introcing an oxidizing gas to the newly sintered and cooled parts, at programmable rate.
Water Cooling System
The furnace cooling system is designed to adequately cool the various furnace components that require water cooling. Each major water circuit is provided with a flow switch and shut-off valve. If water flow is not sufficient for 5 seconds or more, an alarm activates and the corresponding components will be shut down in a safe manner.
For rapid cooling, the cooling chamber is equipped with a water-cooled gas heat exchanger.
To obtain consistent cool-down times and eliminate dependency on plant water, the furnace can also be equipped with a closed-loop chiller recirculator.
Utilities
Power: Up to 150 kVA based on configuration, 380-480-575 V/3/50-60 Hz
Water: Up to 30 G.P.M. (117 lpm) based on kVA @ 70°F (20°C) and 50 P.S.I.G. (3.4 bar)
Process Gas: Argon 100 lpm. @ 50 P.S.I.G. (3.4 bar), process gas @ 20 lpm
Compressed Air: 60-90 P.S.I.G. (4.1 – 6.2 bar) filtered.
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