sigma 2200℃小型热处理炉包含一个0.3立方英尺（8.4升）的可用区域炉膛，其温度可高达2200℃，并可配备多种选择。

此处显示的装置具有一个带露点控制的氢气润湿系统和一个6〃扩散泵系统。其他选项可用。

加热区采用钨网加热元件，具有良好的均匀性和使用寿命。控制面板允许完全控制熔炉。

我们的可选PC控制包提供了额外的功能，如数据趋势和存储（数据采集）、警报的显示和记录、温度控制的无限配方配置文件、用户安全等。该炉适用于研发和小批量生产炉。

sigma small heat treat furnace contains a 0.3 cubic foot (8.4 liter) usable zone capable of temperatures up to 2200 ℃ and can be equipped with many options.

 

The unit shown here features a hydrogen wetting system with dew-point control, and a 6″ diffusion pumping system. Other options are available.

 

The hot zone features tungsten mesh heating elements, providing excellent uniformity and longevity. The control panel allows full control of the furnace.

 

Our optional PC control package provides additional features such as data trends and storage (Data acquisition), display and logging of alarms, unlimited recipe profiles for temperature control, user security, etc. This furnace is suitable for both R&D and as a small batch furnace for proction.

 

结构性能：

额定温度：2200℃（4000°F）

炉膛尺寸：4〃x 6〃x 8〃（101 mm x 152 mm x 203 mm）可用热区

良的温度均匀性

氢气、惰性气体或真空环境

粗真空系统，可选扩散或涡轮泵系统

钨网加热元件，使用寿命长

带露点控制选项的氢气润湿系统

 

General specifications:

Maximum 2200 ℃ (4000 °F)

4″ x 6 ” x 8″ (101 mm x 152 mm x 203 mm) usable hot zone

Excellent temperature uniformity

Hydrogen, inert gas or vacuum Atmosphere

Rough vacuum system, optional diffusion or turbo pumping system

Tungsten mesh heating elements for long life

Hydrogen wetting system with dewpoint control option

 

结构特点

燃烧室和热区

燃烧室从前面加载，并包含一个热区，测量值为6〃W x 8〃H x 10〃D和+/-10℃的温度梯度。加热元件由4个钨网片组成，加热负载的4个侧面，具有良好的均匀性和寿命。热区护罩安装在一个腔室框架内，允许热循环期间区域的热增长。

炉室由焊接在一起并抛光的双层不锈钢制成，以获得干净的表面光洁度和良好的真空完整性。包括传感器和辅助端口。

炉料放在负载支撑轨上。负载支架的设计具有高负载能力和低室壁导热损失的特点。

电源和控制

可控硅控制的变压器为热区供电，包括所有必要的断路器、接触器和保险丝，以满足适用的NFPA规范。与温度控制器结合，电源通过与加热元件电阻匹配的降压变压器来调节对热区的功率。伏特和安培表显示用电量，一组水冷电力电缆将电力从变压器输送到熔炉的高温区。

有两种控制选项，一种是带有经典开关、灯、温度控制器和真空仪表的控制面板，或者是一种带有人机界面软件和工业触摸屏PC的计算机接口包。这两种控制方式都能对熔炉进行全方位控制，并且易于操作。计算机包增加了数据采集、报警、配方存储、安全和联网。

“C”型铠装热电偶可测量高达2000℃的炉温。当炉子运行到2000℃以上的温度时，使用双色高温计，自动TC去除器将TC从热区收回，以防止其过热。当热区温度超过额定设计温度时，安全超温控制器将切断热区的电源。

真空系统

基本的粗真空系统由旋转叶片机械泵、电空真空阀和真空计组成。该系统在真空环境下工作（真空范围为10-10）。

也可提供4〃或6〃扩散泵送系统，以达到10-6 Torr的真空水平。我们的扩散泵系统包括一个冷藏冷阱，以防止石油回流，并获得较低的极限真空度。

可提供一个真空泵或真空泵系统，以获得一个真空泵或真空泵系统。

气体系统

惰性或易燃气体系统在热试验期间为工作样品提供惰性或还原性环境。

基本惰性气体系统（氩气）包括一个电磁阀操作的进气阀，一个复合压力表（30 P.S.I.G.x 30 in。一个气体流量计和一个2P.S.I.G.出口安全阀，以保持正压力。

对于氢气操作，额外的螺线管和传感器提供安全可靠的操作。燃烧装置点燃并监测从炉中排出的任何易燃气体。安全排气口可释放任何过高的腔室压力。

我们的湿氢套件增加了一个氢气露点发生器系统，生产湿氢时有一个可控制和可编程的露点，以满足工艺要求。

水冷系统

炉水冷却歧管由多个回路组成，以充分冷却熔炉的所有部件，包括过滤器、压力调节器、压力计、进水和出水歧管以及水流开关。水流开关有一个可视水流指示器和一个流量联锁装置，以在水流发生故障时保护熔炉。如果水流在一定时间内低于建议的设计小值，此开关将关闭热区接触器的电源。熔炉的每个部分都有一个立的冷却回路，可以通过立的手动球阀进行调节。

其它配置：

功率：kVA取决于额定温度，380-480-575 V/3/50-60 Hz

水：所需流量取决于kVA额定值，70°F（20℃）@50 P.S.I.G.（3.4 bar）

工艺气体：氩气或氮气，氢40 L.P.M.@50 P.S.I.G.（3.4 bar）

压缩空气：60–90 P.S.I.G.（4.1–6.2 bar）过滤。

 

 

Chamber and Hot Zone

The chamber is loaded from the front and contains a hot zone measuring 6″ W x 8″ H x 10″ D and a +/- 10℃ temperature gradient. The heating element is comprised of 4 tungsten mesh panels, heating 4 sides of the load, and feature excellent uniformity and longevity. The hot zone shields are mounted in a chamber frame, allowing for the thermal growth of the zone ring heat cycling.

 

The furnace chamber is manufactured from double-walled stainless steel welded together and polished for a clean finish and good vacuum integrity. Ports are incorporated for auxiliary equipment and sensors.

 

The furnace load is placed on the load support rails. The load supports are engineered to feature a high load capacity and a low thermal conctivity loss to the chamber walls.

 

Power Supply & Controls

An SCR-controlled transformer powers the hot zone and includes all necessary circuit breakers, contactors, and fuses to meet applicable NFPA codes. In combination with the temperature controller, the power supply molates power to the hot zone through use of a step-down transformer matched with the heating element resistance. Volt and amp meters display power usage, and a set of water-cooled power cables carry power from the transformer to the hot zone of the furnace.

 

Two control options are available, a control panel with classic switches, lights, temperature controller and vacuum instrument, or a Computer Interface package with HMI software and Instrial touch-panel PC. Both offer full control of the furnace and are easy to operate. The computer package adds data acquisition, alarms, recipe storage, security and networking.

 

A type “C” sheathed thermocouple measures the furnace temperature up to 2000℃. When operating the furnace to temperatures above 2000℃, a  two-color pyrometer is used and an automatic TC remover will retract the TC from the hot zone to protect it from overheating. A safety over-temperature controller shuts off power to the hot zone in the event the hot zone temperature exceeds the maximum design temperature.

 

Vacuum System

The basic rough vacuum system consists of a Rotary Vane Mechanical Pump, an electro-pneumatic vacuum valve, and a vacuum gauge. This vacuum system will allow for operation in a vacuum environment (10-2 to 10-3 Torr range).

A 4″ or 6″ diffusion pumping system can be provided as well to achieve vacuum levels down to 10-6 Torr. Our diffusion pumping systems include a refrigerated cold trap to prevent oil backstreaming and to obtain a lower ultimate vacuum.

A turbo pumping system or cryo pumping system can be provided with a “dry” roughing pump to provide an oil-free vacuum system for ultra clean environments and to obtain a vacuum level of 10-7 to 10-8 Torr range.

Gas System

An inert or flammable gas system provides an inert or recing environment for the work samples ring the heat testing.

 

The basic inert gas system (Argon) includes a solenoid-operated inlet valve, a compound gauge (30 P.S.I.G. x 30 in. Hg.), a gas flow meter, and a 2 P.S.I.G. outlet relief valve to maintain a positive pressure.

 

For operation in hydrogen, additional solenoids and sensors provide safe and reliable operation. A burn-off kit ignites and monitors any flammable gas exiting the furnace. A safety blow-off port relieves any excessive chamber pressure.

 

Our Wet Hydrogen Kit adds a hydrogen dewpoint generator system, procing wet hydrogen with a controlled and programmable dewpoint to meet process requirements.

 

Water cooling system

The furnace water cooling manifold consists of multiple circuits to adequately cool all the furnace parts and includes a strainer, pressure regulator, pressure gauge, water inlet and outlet manifold, and a water flow switch.  The water flow switch has a visual water flow indicator and a flow interlock to protect the furnace in the event of a water flow failure. This switch turns off power to the hot zone contactor if water flow is below recommended minimum for a certain amount of time. Each part of the furnace is supplied with a separate cooling circuit that can be regulated by independent manual ball valves.

 

Utilities

Power: kVA dependant on maximum temperature, 380-480-575 V/3/50-60 Hz

Water: required flow dependent on kVA rating, 70 °F (20℃) @ 50 P.S.I.G. (3.4 bar)

Process Gas: Argon or Nitrogen, Hydrogen 40 L.P.M. @ 50 P.S.I.G. (3.4 bar)

Compressed Air: 60 – 90 P.S.I.G. (4.1 – 6.2 bar) filtered.

 

 

Available Options for our small heat treat furnace:

Retort– isolates the hot zone from corrosive by-procts and increases thermal uniformity

Larger hot zones – we have a variety of front loading hot zone sizes

High vacuum diffusion pumping system – for ultra pure environments

High vacuum turbo pumping system – for ultra pure environments

HMI system – customized control system with PC user-friendly interface for fully automated runs and data acquisition

Pyrometer and retractable TC – used for optical temperature measurement

Partial pressure control – allows chamber pressure to be controlled to programmable setpoint

Flammable gas system – add capability to heat parts in a recing environment such as Hydrogen (limits max temperature)

Gas wetting system – if your process requires recing environments

Chiller– for closed-loop cooling

O2 monitor – for measuring oxygen content of supply gas or chamber environment

Gas purifier – for removal of impurities from the gas supply

CE certification – for export to International countries requiring CE

UPS – to keep essential components operational ring power outages

RGA – to measure and analyze resial gases inside the chamber